6. Sputtering

1. Introduction & Collision Kinematics ] 2. Cross Sections ] 3. Potentials & Collision Dynamics ] 4. Stopping ] 5. Ranges & Radiation Damage ] [ 6. Sputtering ]

Class notes: sputtering notes.pdf

Additional material: Sputtering - Townsend, Kelly & Hartley.pdf

 
Copyright 2003: Raśl A. Baragiola