| Accelerators Inc. (later Veeco) ion implanter. 20 -300 kV acceleration voltage, electromagnetic separation, two beam lines with focusing and scanning contron. |
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Contact Info: LASP, University of Virginia, Thornton Hall, 351 McCormick Road, P. O. Box 400238 Charlottesville, VA 22904-4238, U. S. A. | Phone: 434-924-1059 |