|
TECHNIQUE
|
Plus feature
|
- Minus features
|
- LEED/RHEED
|
- Simple crystal order
- Inexpensive
|
- only crystals
- difficult to get lattice spacing
- may damage sample
- no elemental or chemical info
|
- XPS
|
- Chemical information
- low damage
- small charging problems 10% accuracy with standards
|
- poor spatial resolution
- slow
- does not detect H
|
- AES
|
- High spatial resolution
- Fast
- 10% accuracy with standards
|
- may damage
- charging problems
|
- ISS
|
- See only surface
- Low damage with He
- surface structure
- some isotopic information
|
- no mapping available
- medium to poor elemental ID
-
|
- RBS
|
- Depth profile non destructive
- Absolute quantification (< 5%)
- Structure using channeling
- low damage
|
- Requires expensive accelerator
- Poor depth resolution
|
- SIMS
|
- Extremely sensitive
- Detects H
- Isotope information
- Very fast
|
- Quantification very hard
-
|
- ESD
|
- Detects H
- structural information
- mapping
|
- Only detects some elements
- Destructive
|
