The most recent microscope is a JEOL 2010F, 200 kV TEM equipped with a thermal field-emission source, an Oxford Pentafet ultra-thin window energy-dispersive X-ray spectrometer (EDXS) and a Gatan imaging filter (GIF). This microscope has a point resolution of 0.23 nm, an information limit of 0.14 nm and ± 30° double-tilt capability with the JEOL low-background analytical holder. It can form a 1 nm probe with 1 nA of current on the specimen and a 0.5 nm probe with about 0.3 nA of current. These probe/current relationships allow EDXS analysis of 0.5-1.0 nm areas of a thin foil with reasonable counting statistics. X-ray spectra are collected and analyzed using the NIST Desktop Spectrum Analyser (DTSA) software package. The GIF contains a slow-scan CCD camera (SSC), a TV-rate camera, a parallel electron energy-loss spectrometer (PEELS). Gatan's Digital Micrograph and EL/P software are used for digital imaging, energy-filtered imaging and PEELS analysis. Although film is used in the microscope, most data are acquired digitally and easily retrieved on a memory stick or CD from the Dell computer. This microscope also has Gatan low-background double-tilt hot-stage (25-1000°C) and cold-stage (liquid nitrogen) specimen holders.
Nanoprobe X-ray analysis from the JEOL 2010F microscope showing segregation of Ag to precipitate interfaces in an Al-Cu-Mg-Ag aircraft alloy.