The facility recently acquired a completely digital JEOL JSM-6700F cold field-emission gun SEM. This microscope operates at accelerating voltages ranging from 0.5 to 30 kV in 0.1 kV steps and has a guaranteed resolution of 1.0 nm at 15 kV and 2.2 nm at 1.0 kV. It has secondary electron imaging (SEI) capability utilizing both through-the-lens and in-chamber secondary electron detectors and backscattered electron imaging (BEI) with both compositional and topographical imaging contrast. The microscope is equipped with a monochromator cathodoluminescence system for imaging and spectroscopy of light emitted from the specimen. It is also equipped with a PGT IMIX-SPIRIT energy-dispersive X-ray spectroscopy (EDXS) detector with an ultra-thin window for light element detection down to boron. This system permits image collection with a complete spectrum stored for each pixel in the image. The system utilizes a Windows 2000 operating system running on a 933 MHz Dell computer with a 40 GB hard drive for image storage and processing. The specimen stage is fully computer controlled, allowing for automation of X, Y, Z, tilt and eucentric rotation. A liquid-nitrogen cooling stage and a heating stage are available for in situ temperature experiments.
