NanoScale Materials Characterization Facility



Focused Ion Beam (OFFLINE)



Pt, SiO2 deposition sources (organic platinum, Si) Secondary Ion Mass Spectrometer
Secondary Electron / Ion Imaging Cooling / Heating (77 to 700 K)
Minimum spot size ~ 10 nm
Ion current density > 10 A/cm2
Ion currents 1 pA to 10 nA
Ion energies 3 keV to 30 keV
Charge Neutralization
Depth of focus ~ 200 mm

OVERVIEW: Partnerships are in the works to bring back online within NMCF a future dual beam focused ion beam (FIB) system. Contact Richard White, rrw3q [at] for partnership details and advantages of being a funding partner.