NanoScale Materials Characterization Facility

Xradia MicroXCT-200 X-Ray Computed Tomography Instrument

WDF B011

Non-destructive 3D imaging
High spatial resolution down to <1 µm and pixel size down to 0.56 µm
Minimal dependence of resolution on sample size
Minimal need for sample preparation
Easy navigation through a multiple magnification detector system
Continuous operation through automated multiple point tomography and repetitive scanning
Robust and low maintenance system
High speed reconstruction

Sample Size Limit = 150 nm
Stage Load Limit = 1 kg
X travel: 90 nm, Y travel: 50 nm, Z travel: 10nm
Detectror travel: 120 nm, Source travel: 85 nm